The influence of low and steady loading on the oxidation behaviour and oxygen diffusion within Ti6242S was investigated at 650 °C in air. Electron probe microanalyser (EPMA), secondary-ion mass spectrometry (SIMS) and high energy synchrotron X-ray diffraction (S-XRD) were used to quantify the oxygen distribution within the oxygen-enriched layer beneath the external oxide scale. Rietveld and peak by peak methods were used to evaluate the average response versus the crystal-oriented response of this diffusion process under load. Interestingly, a thermo-mechano-chemical coupling occurs during the creep-oxidation experiment even for moderate applied stresses (25-70 MPa) and demonstrates: (i) a decrease of the oxygen concentration at the metal/oxide interface, and (ii) a curvature change of the oxygen diffusion profile with load application. A qualitative thermo-mechano-chemical approach is proposed to model the modification of the diffusion law of the oxygen within Ti6242S due to application of a mechanical loading to explain observed experimental results.